IP Library Granted Patent US 4,488,166
Granted Patent Utility
US 4,488,166 · App. 06/484,070

Multilayer metal silicide interconnections for integrated circuits

Inventor: William I. Lehrer
Patented Case View Patent ↗
Granted: Dec 11, 1984 Filed: Apr 11, 1983
Inventor
William I. Lehrer
Assignee (at issue)
Fairchild Camera & Instrument Corp.

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Quick Facts
Patent No.
US 4,488,166
App. No.
06/484,070
Filed
1983-04-11
Granted
1984-12-11
Kind
A