Granted Patent
Utility
US 4,489,241 · App. 06/386,579
Exposure method with electron beam exposure apparatus
Inventors:
Tadahito Matsuda, Tsuneo Okubo, Susumu Ozasa, Norio Saitou, Haruo Yoda
Patented Case
View Patent ↗
Granted: Dec 18, 1984
Filed: Jun 9, 1982
Inventors
Tadahito Matsuda
Tsuneo Okubo
Susumu Ozasa
Norio Saitou
Haruo Yoda
Assignees (at issue)
HITACHI, LTD.
Nippon Telegraph and Telephone Public Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.