Granted Patent
Utility
US 4,498,010 · App. 06/491,678
Virtual addressing for E-beam lithography
Inventors:
Charles S. Biechler, Allen M. Carroll, Richard E. Graves, Steven A. Lyons
Patented Case
View Patent ↗
Granted: Feb 5, 1985
Filed: May 5, 1983
Inventors
Charles S. Biechler
Allen M. Carroll
Richard E. Graves
Steven A. Lyons
Assignee (at issue)
PerkinElmer, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.