IP Library › Granted Patent US 4,498,762
Granted Patent Utility
US 4,498,762 · App. 06/451,394

Projection type exposure apparatus

Inventors: Makoto Uehara, Satoru Anzai
Patented Case View Patent ↗
Granted: Feb 12, 1985 Filed: Dec 20, 1982
Inventors
Makoto Uehara
Satoru Anzai
Assignee (at issue)
Nippon Kogaku K.K.

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Quick Facts
Patent No.
US 4,498,762
App. No.
06/451,394
Filed
1982-12-20
Granted
1985-02-12
Kind
A