IP Library Granted Patent US 4,498,775
Granted Patent Utility
US 4,498,775 · App. 06/349,515

Method for detecting distance deviations to a photoresist surface in an optical printer

Inventor: Lawrence K. White
Patented Case View Patent ↗
Granted: Feb 12, 1985 Filed: Feb 17, 1982
Inventor
Lawrence K. White
Assignee (at issue)
RCA Corporation

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Quick Facts
Patent No.
US 4,498,775
App. No.
06/349,515
Filed
1982-02-17
Granted
1985-02-12
Kind
A