IP Library › Granted Patent US 4,501,061
Granted Patent Utility
US 4,501,061 · App. 06/499,747

Fluorine plasma oxidation of residual sulfur species

Inventor: Gerald R. Wonnacott
Patented Case View Patent ↗
Granted: Feb 26, 1985 Filed: May 31, 1983
Inventor
Gerald R. Wonnacott
Assignee (at issue)
Advanced Micro Devices, Inc.

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Quick Facts
Patent No.
US 4,501,061
App. No.
06/499,747
Filed
1983-05-31
Granted
1985-02-26
Kind
A