IP Library Granted Patent US 4,501,368
Granted Patent Utility
US 4,501,368 · App. 06/426,500

Substrate support module

Inventor: Daniel Gill
Patented Case View Patent ↗
Granted: Feb 26, 1985 Filed: Sep 29, 1982
Inventor
Daniel Gill
Assignee (at issue)
AT&T Technologies Incorporated

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Quick Facts
Patent No.
US 4,501,368
App. No.
06/426,500
Filed
1982-09-29
Granted
1985-02-26
Kind
A