IP Library Granted Patent US 4,502,206
Granted Patent Utility
US 4,502,206 · App. 06/553,255

Method of forming semiconductor contacts by implanting ions of neutral species at the interfacial region

Inventors: George L. Schnable, Chung P. Wu
Patented Case View Patent ↗
Granted: Mar 5, 1985 Filed: Nov 18, 1983
Inventors
George L. Schnable
Chung P. Wu
Assignee (at issue)
RCA Corporation

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Quick Facts
Patent No.
US 4,502,206
App. No.
06/553,255
Filed
1983-11-18
Granted
1985-03-05
Kind
A