Granted Patent
Utility
US 4,503,087 · App. 06/527,140
Process for high temperature drive-in diffusion of dopants into semiconductor wafers
Inventor:
Carl J. Russo
Patented Case
View Patent ↗
Granted: Mar 5, 1985
Filed: Aug 29, 1983
Inventor
Carl J. Russo
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.