Granted Patent
Utility
US 4,503,598 · App. 06/380,170
Method of fabricating power MOSFET structure utilizing self-aligned diffusion and etching techniques
Inventors:
Madhukar B. Vora, Vikram PATEL
Patented Case
View Patent ↗
Granted: Mar 12, 1985
Filed: May 20, 1982
Inventors
Madhukar B. Vora
Vikram PATEL
Assignee (at issue)
Fairchild Camera & Instrument Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.