IP Library › Granted Patent US 4,510,176
Granted Patent Utility
US 4,510,176 · App. 06/535,916

Removal of coating from periphery of a semiconductor wafer

Inventors: John David Cuthbert, Nicholas A. Soos
Patented Case View Patent ↗
Granted: Apr 9, 1985 Filed: Sep 26, 1983
Inventors
John David Cuthbert
Nicholas A. Soos
Assignee (at issue)
AT&T Bell Laboratories

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Quick Facts
Patent No.
US 4,510,176
App. No.
06/535,916
Filed
1983-09-26
Granted
1985-04-09
Kind
A