Granted Patent
Utility
US 4,512,073 · App. 06/582,752
Method of forming self-aligned contact openings
Inventor:
Sheng Teng Hsu
Patented Case
View Patent ↗
Granted: Apr 23, 1985
Filed: Feb 23, 1984
Inventor
Sheng Teng Hsu
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.