Granted Patent
Utility
US 4,512,391 · App. 06/343,794
Apparatus for thermal treatment of semiconductor wafers by gas conduction incorporating peripheral gas inlet
Inventor:
David J. Harra
Patented Case
View Patent ↗
Granted: Apr 23, 1985
Filed: Jan 29, 1982
Inventor
David J. Harra
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.