Granted Patent
Utility
US 4,513,076 · App. 06/497,527
Electron beam sensitive resist
Inventor:
David F. Lewis
Patented Case
View Patent ↗
Granted: Apr 23, 1985
Filed: May 24, 1983
Inventor
David F. Lewis
Assignee (at issue)
GAF Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.