IP Library Granted Patent US 4,513,348
Granted Patent Utility
US 4,513,348 · App. 06/570,552

Low parasitic capacitance pressure transducer and etch stop method

Inventor: Daniel H. Grantham
Patented Case View Patent ↗
Granted: Apr 23, 1985 Filed: Jan 13, 1984
Inventor
Daniel H. Grantham
Assignee (at issue)
UNITED TECHNOLOGIES CORPORATION

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Quick Facts
Patent No.
US 4,513,348
App. No.
06/570,552
Filed
1984-01-13
Granted
1985-04-23
Kind
A