Granted Patent
Utility
US 4,513,430 · App. 06/381,290
Missing or broken wafer sensor
Inventors:
Mahasukh Vora, Rajender Malhotra
Patented Case
View Patent ↗
Granted: Apr 23, 1985
Filed: May 24, 1982
Inventors
Mahasukh Vora
Rajender Malhotra
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.