Granted Patent
Utility
US 4,515,675 · App. 06/624,940
Magnetron cathode for cathodic evaportion apparatus
Inventors:
Jorg Kieser, Reiner Kukla, Gerd Deppisch
Patented Case
View Patent ↗
Granted: May 7, 1985
Filed: Jun 27, 1984
Inventors
Jorg Kieser
Reiner Kukla
Gerd Deppisch
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.