Granted Patent
Utility
US 4,515,876 · App. 06/513,954
X-Ray lithography mask and method for fabricating the same
Inventors:
Hideo Yoshihara, Akira Ozawa, Misao Sekimoto, Toshiro Ono
Patented Case
View Patent ↗
Granted: May 7, 1985
Filed: Jul 15, 1983
Inventors
Hideo Yoshihara
Akira Ozawa
Misao Sekimoto
Toshiro Ono
Assignee (at issue)
Nippon Telegraph and Telephone Public Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.