Granted Patent
Utility
US 4,517,276 · App. 06/445,353
Metal-containing organic photoresists
Inventor:
Carol R. Lewis
Patented Case
View Patent ↗
Granted: May 14, 1985
Filed: Nov 29, 1982
Inventor
Carol R. Lewis
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.