Granted Patent
Utility
US 4,518,078 · App. 06/634,175
Wafer transport system
Inventor:
Charles B. Garrett
Patented Case
View Patent ↗
Granted: May 21, 1985
Filed: Jul 24, 1984
Inventor
Charles B. Garrett
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.