Granted Patent
Utility
US 4,518,848 · App. 06/263,928
Apparatus for baking resist on semiconductor wafers
Inventor:
T. Jerome Weber
Patented Case
View Patent ↗
Granted: May 21, 1985
Filed: May 15, 1981
Inventor
T. Jerome Weber
Assignee (at issue)
GCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.