Granted Patent
Utility
US 4,520,757 · App. 06/564,863
Process gas introduction, confinement and evacuation system for glow discharge deposition apparatus
Inventors:
Prem Nath, Kevin Hoffman, Timothy D. Laarman
Patented Case
View Patent ↗
Granted: Jun 4, 1985
Filed: Dec 23, 1983
Inventors
Prem Nath
Kevin Hoffman
Timothy D. Laarman
Assignee (at issue)
Energy Conversion Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.