Granted Patent
Utility
US 4,521,717 · App. 06/445,339
Apparatus for producing a microwave plasma for the treatment of substrates, in particular for the plasma-polymerization of monomers thereon
Inventor:
Jorg Kieser
Patented Case
View Patent ↗
Granted: Jun 4, 1985
Filed: Nov 29, 1982
Inventor
Jorg Kieser
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.