Granted Patent
Utility
US 4,522,149 · App. 06/553,962
Reactor and susceptor for chemical vapor deposition process
Inventors:
Dennis Garbis, Joseph Chan, Amedeo J. Granata, Robert Heller
Patented Case
View Patent ↗
Granted: Jun 11, 1985
Filed: Nov 21, 1983
Inventors
Dennis Garbis
Joseph Chan
Amedeo J. Granata
Robert Heller
Assignee (at issue)
General Instrument Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.