Granted Patent
Utility
US 4,522,697 · App. 06/564,740
Wafer processing machine
Inventors:
Jack A. Dimock, Peter J. Clarke
Patented Case
View Patent ↗
Granted: Jun 11, 1985
Filed: Dec 22, 1983
Inventors
Jack A. Dimock
Peter J. Clarke
Assignee (at issue)
Sputtered Films, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.