Granted Patent
Utility
US 4,523,985 · App. 06/564,748
Wafer processing machine
Inventor:
Jack A. Dimock
Patented Case
View Patent ↗
Granted: Jun 18, 1985
Filed: Dec 22, 1983
Inventor
Jack A. Dimock
Assignee (at issue)
Sputtered Films, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.