Granted Patent
Utility
US 4,524,261 · App. 06/533,822
Localized vacuum processing apparatus
Inventors:
Paul F. Petric, Michael S. Foley
Patented Case
View Patent ↗
Granted: Jun 18, 1985
Filed: Sep 19, 1983
Inventors
Paul F. Petric
Michael S. Foley
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.