Granted Patent
Utility
US 4,524,719 · App. 06/529,415
Substrate loading means for a chemical vapor deposition apparatus
Inventors:
Bryant A. Campbell, Dale R. DuBois, Ralph F. Manriquez, Nicholas Miller
Patented Case
View Patent ↗
Granted: Jun 25, 1985
Filed: Sep 6, 1983
Inventors
Bryant A. Campbell
Dale R. DuBois
Ralph F. Manriquez
Nicholas Miller
Assignee (at issue)
Anicon, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.