IP Library Granted Patent US 4,525,629
Granted Patent Utility
US 4,525,629 · App. 06/386,115

Deflective focusing system for charged particle beam

Inventors: Hirofumi Morita, Teruo Hosokawa
Patented Case View Patent ↗
Granted: Jun 25, 1985 Filed: Jun 7, 1982
Inventors
Hirofumi Morita
Teruo Hosokawa
Assignee (at issue)
Nippon Telegraph and Telephone Public Corporation

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Quick Facts
Patent No.
US 4,525,629
App. No.
06/386,115
Filed
1982-06-07
Granted
1985-06-25
Kind
A