Granted Patent
Utility
US 4,528,451 · App. 06/435,177
Gap control system for localized vacuum processing
Inventors:
Paul F. Petric, Michael S. Foley, Mark W. Utlaut, Joseph A. Laiacano
Patented Case
View Patent ↗
Granted: Jul 9, 1985
Filed: Oct 19, 1982
Inventors
Paul F. Petric
Michael S. Foley
Mark W. Utlaut
Joseph A. Laiacano
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.