IP Library Granted Patent US 4,535,834
Granted Patent Utility
US 4,535,834 · App. 06/606,051

Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system

Inventor: Norman L. Turner
Patented Case View Patent ↗
Granted: Aug 20, 1985 Filed: May 2, 1984
Inventor
Norman L. Turner
Assignee (at issue)
Varian, Inc.

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Quick Facts
Patent No.
US 4,535,834
App. No.
06/606,051
Filed
1984-05-02
Granted
1985-08-20
Kind
A