IP Library Granted Patent US 4,536,231
Granted Patent Utility
US 4,536,231 · App. 06/612,877

Polysilicon thin films of improved electrical uniformity

Inventor: Alan J. Kasten
Patented Case View Patent ↗
Granted: Aug 20, 1985 Filed: May 22, 1984
Inventor
Alan J. Kasten
Assignee (at issue)
HARRIS CORPORATION

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Quick Facts
Patent No.
US 4,536,231
App. No.
06/612,877
Filed
1984-05-22
Granted
1985-08-20
Kind
A