IP Library Granted Patent US 4,536,882
Granted Patent Utility
US 4,536,882 · App. 06/119,331

Embedded absorber X-ray mask and method for making same

Inventors: Addison B. Jones, Siegfried G. Plonski
Patented Case View Patent ↗
Granted: Aug 20, 1985 Filed: Feb 7, 1980
Inventors
Addison B. Jones
Siegfried G. Plonski
Assignee (at issue)
Rockwell International Corporation

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Quick Facts
Patent No.
US 4,536,882
App. No.
06/119,331
Filed
1980-02-07
Granted
1985-08-20
Kind
A