Granted Patent
Utility
US 4,537,795 · App. 06/637,358
Method for introducing sweep gases into a glow discharge deposition apparatus
Inventors:
Prem Nath, Kevin Hoffman, Timothy D. Laarman
Patented Case
View Patent ↗
Granted: Aug 27, 1985
Filed: Aug 3, 1984
Inventors
Prem Nath
Kevin Hoffman
Timothy D. Laarman
Assignee (at issue)
Sovonics Solar Systems
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.