Granted Patent
Utility
US 4,539,062 · App. 06/588,853
Modular plasma reactor with local atmosphere
Inventor:
John Zajac
Patented Case
View Patent ↗
Granted: Sep 3, 1985
Filed: Mar 12, 1984
Inventor
John Zajac
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.