IP Library Granted Patent US 4,539,288
Granted Patent Utility
US 4,539,288 · App. 06/561,505

Process for the development of relief structures based on radiation-crosslinked polymeric precursors of polymers which are resistant to high temperature

Inventors: Hans-Joachim Merrem, Karlheinz Neisius, Rudolf Klug, Hartmut Hartner
Patented Case View Patent ↗
Granted: Sep 3, 1985 Filed: Dec 15, 1983
Inventors
Hans-Joachim Merrem
Karlheinz Neisius
Rudolf Klug
Hartmut Hartner
Assignee (at issue)
Merck Patent GmbH

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Quick Facts
Patent No.
US 4,539,288
App. No.
06/561,505
Filed
1983-12-15
Granted
1985-09-03
Kind
A