Granted Patent
Utility
US 4,542,298 · App. 06/502,812
Methods and apparatus for gas-assisted thermal transfer with a semiconductor wafer
Inventor:
Scott C. Holden
Patented Case
View Patent ↗
Granted: Sep 17, 1985
Filed: Jun 9, 1983
Inventor
Scott C. Holden
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.