Granted Patent
Utility
US 4,545,882 · App. 06/528,951
Method and apparatus for detecting sputtering target depletion
Inventor:
Harold E. McKelvey
Patented Case
View Patent ↗
Granted: Oct 8, 1985
Filed: Sep 2, 1983
Inventor
Harold E. McKelvey
Assignee (at issue)
Shatterproof Glass Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.