IP Library › Granted Patent US 4,547,247
Granted Patent Utility
US 4,547,247 · App. 06/588,031

Plasma reactor chuck assembly

Inventors: Douglas H. Warenback, Thomas M. Rathmann, Ninko T. Mirkovich
Patented Case View Patent ↗
Granted: Oct 15, 1985 Filed: Mar 9, 1984
Inventors
Douglas H. Warenback
Thomas M. Rathmann
Ninko T. Mirkovich
Assignee (at issue)
TEGAL CORPORATION

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Quick Facts
Patent No.
US 4,547,247
App. No.
06/588,031
Filed
1984-03-09
Granted
1985-10-15
Kind
A