IP Library Granted Patent US 4,547,248
Granted Patent Utility
US 4,547,248 · App. 06/588,854

Automatic shutoff valve

Inventors: Roger B. Lachenbruch, John Zajac
Patented Case View Patent ↗
Granted: Oct 15, 1985 Filed: Mar 12, 1984
Inventors
Roger B. Lachenbruch
John Zajac
Assignee (at issue)
TEGAL CORPORATION

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Quick Facts
Patent No.
US 4,547,248
App. No.
06/588,854
Filed
1984-03-12
Granted
1985-10-15
Kind
A