IP Library › Granted Patent US 4,547,404
Granted Patent Utility
US 4,547,404 · App. 06/657,313

Chemical vapor deposition process

Inventors: Bryant A. Campbell, Nicholas Miller
Patented Case View Patent ↗
Granted: Oct 15, 1985 Filed: Oct 2, 1984
Inventors
Bryant A. Campbell
Nicholas Miller
Assignee (at issue)
Anicon, Inc.

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Quick Facts
Patent No.
US 4,547,404
App. No.
06/657,313
Filed
1984-10-02
Granted
1985-10-15
Kind
A