Granted Patent
Utility
US 4,548,159 · App. 06/628,542
Chemical vapor deposition wafer boat
Inventors:
Derrick W. Foster, Robert Herring
Patented Case
View Patent ↗
Granted: Oct 22, 1985
Filed: Jul 6, 1984
Inventors
Derrick W. Foster
Robert Herring
Assignee (at issue)
Anicon, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.