Granted Patent
Utility
US 4,550,258 · App. 06/515,304
Aperture structure for charged beam exposure
Inventors:
Fujio Omata, Kiichi Takamoto
Patented Case
View Patent ↗
Granted: Oct 29, 1985
Filed: Jul 19, 1983
Inventors
Fujio Omata
Kiichi Takamoto
Assignee (at issue)
Nippon Telegraph and Telephone Public Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.