Granted Patent
Utility
US 4,550,374 · App. 06/441,413
High speed alignment method for wafer stepper
Inventors:
Boris Meshman, Thomas A. Kerekes, Lawrence S. Green, David Karlinsky
Patented Case
View Patent ↗
Granted: Oct 29, 1985
Filed: Nov 15, 1982
Inventors
Boris Meshman
Thomas A. Kerekes
Lawrence S. Green
David Karlinsky
Assignee (at issue)
TRE Semiconductor Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.