Granted Patent
Utility
US 4,553,069 · App. 06/568,175
Wafer holding apparatus for ion implantation
Inventor:
Kenneth H. Purser
Patented Case
View Patent ↗
Granted: Nov 12, 1985
Filed: Jan 5, 1984
Inventor
Kenneth H. Purser
Assignee (at issue)
General Ionex Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.