IP Library Granted Patent US 4,557,950
Granted Patent Utility
US 4,557,950 · App. 06/611,793

Process for deposition of borophosphosilicate glass

Inventors: Thomas C. Foster, Jon C. Goldman, Gary W. Hoeye
Patented Case View Patent ↗
Granted: Dec 10, 1985 Filed: May 18, 1984
Inventors
Thomas C. Foster
Jon C. Goldman
Gary W. Hoeye
Assignee (at issue)
Thermco Systems, Inc.

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Quick Facts
Patent No.
US 4,557,950
App. No.
06/611,793
Filed
1984-05-18
Granted
1985-12-10
Kind
A