Granted Patent
Utility
US 4,563,587 · App. 06/482,745
Focused ion beam microfabrication column
Inventors:
J. William Ward, Victor Wang, Richard P. Vahrenkamp, Robert L. Seliger
Patented Case
View Patent ↗
Granted: Jan 7, 1986
Filed: Apr 7, 1983
Inventors
J. William Ward
Victor Wang
Richard P. Vahrenkamp
Robert L. Seliger
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.