Granted Patent
Utility
US 4,565,157 · App. 06/480,030
Method and apparatus for deposition of tungsten silicides
Inventors:
Daniel L. Brors, James A. Fair, Kenneth A. Monnig
Patented Case
View Patent ↗
Granted: Jan 21, 1986
Filed: Mar 29, 1983
Inventors
Daniel L. Brors
James A. Fair
Kenneth A. Monnig
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.