Granted Patent
Utility
US 4,566,403 · App. 06/696,389
Apparatus for microwave glow discharge deposition
Inventor:
Eugene Fournier
Patented Case
View Patent ↗
Granted: Jan 28, 1986
Filed: Jan 30, 1985
Inventor
Eugene Fournier
Assignee (at issue)
Sovonics Solar Systems
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.