IP Library Granted Patent US 4,566,796
Granted Patent Utility
US 4,566,796 · App. 06/526,066

Method of determining position on a wafer

Inventor: David H. Leebrick
Patented Case View Patent ↗
Granted: Jan 28, 1986 Filed: Aug 24, 1983
Inventor
David H. Leebrick
Assignee (at issue)
HARRIS CORPORATION

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Quick Facts
Patent No.
US 4,566,796
App. No.
06/526,066
Filed
1983-08-24
Granted
1986-01-28
Kind
A